Wafer Handling Robots

Robots transport semiconductor wafers to be processed by multiple processing equipment. Robots assume a critical role in the efficient production of semiconductors.

Arm Type Model name Dgree of Freedom Maximum payload
Single brade SR8230 3 axes 2kg
Double brade SR8240 5 axes 2kg
Double brade SR8241 5 axes 2kg
Arm Type Model name Dgree of Freedom Maximum payload
Single brade SR8220 4 axes 2kg
Boomerang type SR8250 4 axes 2kg