Vacuum Environment Adaption Clean Robots

Clean robots compatible with a high temperature and vacuum environment for OLEDs and semiconductors.

Robot type Model Glass size Vaccum-resistance level Degree of freedom
Scara type SR8651 5.5G 1.33×10-2 5 axes
Scara type SR8652 5.5~6G 1.33×10-2 5 axes
Linear Guide type SR8653 8G 1.33×10-2 5 axes
Arm type Model Vaccum-resistance level Degree of freedom
Double arm Double brade SR8607 1.33×10-2 5 axes
Double arm Boomerang type SR8608 1.33×10-2 4 axes/td>