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Venue: |
Makuhari Messe, Chiba Japan |
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Dates: |
Dec.3-5, 2008 10:00~17:00 |
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Booth Number |
Hall8 (8B-513) |
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Sponsored by: |
SEMI (SEMICON JAPAN2008 Official Site) |
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Exhibiting |
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| ■WAFER HANDLING ROBOTS |
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Atmospheric multi-link robot with 5 blade hand-SR8242 |
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Vacuum robot with mechanical clump end effector-SR8607 |
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High speed wafer handling double arm robot on a track-SR8220 |
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Vacuum Robot with Parallel Link-Conceptional model |
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Atmospheric robot for 450mm wafer-conceptional model |
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| ■ROBOT CONTROLLERS |
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Compact size robot controller for six-axis control-SC5000 |
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| ■PARTICLE MONITOR DTPM Series |
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Standard Model |
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| Wireless LAN Model |
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| Wireless LAN Model |
| New Model with Temp.&Humidity Sensor |
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