|
|
|
 |
|
|
|
|
|
|
|
| Double Hands High-Speed Wafer Handling Robots |
|
|
|
|
|
| Features |
| • |
Lightning fast with maximum throughput. |
| • |
Excellent straight line accuracy. |
| • |
AC servo motors with absolute encoders. |
| • |
Mechanical edge grip or vacuum chuck. |
| • |
Advanced motion control system. |
| • |
Precision high speed motion. |
| • |
50,000 hour MTBF. |
| • |
Super high rigidity. |
| • |
Available in single or dual arm versions. |
| • |
32-bit real-time multitasking controller. |
| • |
Graphical touch screen pendant. |
|
|
|
|
|
|
|
SR8220 (Double arms) |
| Degree of freedom |
all Ac-servo controlled |
| Working range |
1st arm swivel |
-212~+321mm |
| 2nd arm swivel |
| Z axis |
300mm |
| Max. speed |
θ axis |
-170°+170° |
| 1st arm swivel |
5.76rad /s |
| 2nd arm swivel |
| Z axis |
450mm /s |
| θ axis |
6.98rad /s |
| Max. payload |
2kg/1 arm |
| Repeatability |
±0.10mm |
| Weight |
80kg |
|
|
|
|
|
|
|
| Atmospheric Environment Wafer Handling Robots |
|
|
|
|
|
| Features |
• |
Support up to 300mm size of wafers.
|
| • |
Sankyo original triple arm architecture support 3FOUP(SR8240)/4FOUP(SR8241)wafer handling without track axis,which requires much less space and helps preventing vibration and dust exhaust. |
| • |
Dual end effectors enable picking up two wafers from a cassette at the same time. |
| • |
The wide angle of theta axis rotation realizes the shortest path of wafer handling. |
| SR8240/41 |
 |
|
|
SR8240 |
SR8241 |
| Degree of freedom |
5 axes (all Ac-servo controlled) |
| Working range |
X axis |
-440～+440mm |
-650～+650mm |
| Z axis |
300mm |
| Theta axis |
±360deg |
±120deg |
| Roll 1/2 axis |
-270～+450deg |
| Maximum speed |
X axis |
6.28rad/sec |
3.92rad/sec |
Z axis |
500mm/sec |
| Theta axis |
7.82rad/sec |
| Roll 1/2 axis |
9.42rad/sec |
| Maximum payload |
2kg（Wafer + End effector) |
| Repeatability |
±0.1mm |
| Manipulator weight |
70ｋｇ |
| Controller |
SC5000 |
|
|
|
|
|
|
|
|
|
